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Acknowledgements
CMM for dimensional metrology on microsystem components
ASPE 15th Annual Meeting , USA; 2000. p. 542–46.
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Rodriguez-Segundo and Dr. Graciela Velasco-Herrera for
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their help during the project, to Dr. Gabriel Ascanio and
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Dr. Saul Santillan-Gutierrez for their comments and to
tools. Reported in The 1st Korea-Japan Conference on Positioning
Nora E. Reyes-Rocafuerte and Rita Coyne for the lan- Technology, Korea; 2002.
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